Correlation between Fourier-transform-infrared (FTIR) spectra and temperature dependence of dielectric properties of SrTiO3 thin films

被引：0

作者：

Matsui, Ken-ichi ^{[1
]}

Taga, Masahiro ^{[1
]}

Kobayashi, Takeshi ^{[1
]}

机构：

[1] Osaka Univ, Toyonaka, Japan

来源：

Japanese Journal of Applied Physics, Part 2: Letters | 1993年 / 32卷 / 6 A期

关键词：

Dielectric properties - Field effect transistors - Fourier optics - Infrared spectroscopy - Strontium compounds - Thermal effects;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

SrTiO3 (STO) thin films were grown on (111)Pt/(100)MgO substrates at several deposition temperatures TD (350-710°C) and characterized. Deposition temperatures TD ≥ 540°C yielded epitaxial (100)STO films but they strongly affected both the optical and dielectric properties of films. The LO (longitudinal optical phonon) absorption spectra and &partΕ/&partT )temperature coefficient of the dielectric constant) showed similar dependence on TD, and optimization was achieved at TD = 665°C. However, the highest value of the room temperature Ε (=313Ε0, where Ε0 is the vacuum dielectric constant) was obtained from the film grown at TD = 540°C.

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