Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon

被引：0
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作者：
Willing, B. [1 ]
Kohli, M. [1 ]
Muralt, P. [1 ]
Setter, N. [1 ]
Oehler, O. [1 ]
机构：
[1] Ecole Polytechnique Federale de, Lausanne, Lausanne, Switzerland
来源：
| 1998年 / Elsevier Science S.A., Lausanne, Switzerland卷 / 66期
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