Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy

被引：0
|
作者：
Friedrich-Alexander-Universitaet, Erlangen-Nuernberg, Erlangen, Germany [1 ]
机构：
来源：
Thin Solid Films | / 1-2卷 / 186-191期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy
    Petrik, P
    Biro, LP
    Fried, M
    Lohner, T
    Berger, R
    Schneider, C
    Gyulai, J
    Ryssel, H
    THIN SOLID FILMS, 1998, 315 (1-2) : 186 - 191
  • [2] Comparative study of polysilicon-on-oxide using spectroscopic ellipsometry, atomic force microscopy, and transmission electron microscopy
    Petrik, P
    Fried, M
    Lohner, T
    Berger, R
    Biro, LP
    Schneider, C
    Gyulai, J
    Ryssel, H
    THIN SOLID FILMS, 1998, 313 : 259 - 263
  • [3] Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry
    Fang, SJ
    Chen, W
    Yamanaka, T
    Helms, CR
    APPLIED PHYSICS LETTERS, 1996, 68 (20) : 2837 - 2839
  • [4] Characterization of interfacial layers and surface roughness using spectroscopic reflectance, spectroscopic ellipsometry and atomic force microscopy
    Hoobler, RJ
    Korlahalli, R
    Boltich, E
    Serafin, J
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVI, PTS 1 & 2, 2002, 4689 : 756 - 764
  • [5] A simulation study for evaluating and improving the accuracy of surface roughness measured by atomic force microscopy
    Wang, Chunmei
    Itoh, Hiroshi
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2013, 24 (03)
  • [6] MODELING OF SURFACE-ROUGHNESS IN VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY, USING NUMERICAL PROCESSING OF ATOMIC-FORCE MICROSCOPY IMAGES
    URBAN, FK
    ATHEY, PR
    ISLAM, MS
    THIN SOLID FILMS, 1994, 253 (1-2) : 326 - 332
  • [7] Wettability and surface forces measured by atomic force microscopy: the role of roughness
    Gavoille, J.
    Takadoum, J.
    Martin, N.
    Durand, D.
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2009, 48 (01): : 10504p1 - 10504p5
  • [8] Analysis of variable scale surface roughness on Si(111): a comparative Brewster angle, ellipsometry and atomic force microscopy investigation
    Lublow, M
    Lewerenz, HJ
    TRANSACTIONS OF THE INSTITUTE OF METAL FINISHING, 2005, 83 (05): : 238 - 247
  • [9] A comparison of surface roughness of pipes as measured by two profilometers and atomic force microscopy
    Farshad, FF
    Pesacreta, TC
    Garber, JD
    Bikki, SR
    SCANNING, 2001, 23 (04) : 241 - 248
  • [10] Comparison of surface roughness as measured by atomic force microscopy and x-ray scattering
    Munkholm, A.
    Brennan, S.
    Carr, E.C.
    Journal of Applied Physics, 1997, 82 (06):
12345