Germanium High Frequency Transistors in Planar Technology.

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作者
Mueller, Wolfgang
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来源
Bundesministerium fuer Forschung und Technologie, Forschungsbericht, Technologische Forschung und Entwicklung | 1976年
关键词
SEMICONDUCTING GERMANIUM - Ion Implantation;
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摘要
Germanium high-frequency transistors, pnp and npn, using planar designs have been developed. In addition to standard diffusion- and alloy-techniques, mainly ion implantation technique were used forming the emitter- and basejunction following basic experiments with arsenic, phosphorous, boron and aluminum.
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