Super-resolution in 3-D confocal surface profilometry

被引：0
|
作者：
Deng, Xiaoqiang [1 ]
Liu, Li [1 ]
Yang, Lisong [1 ]
Wang, Guiyin [1 ]
Xu, Zhizan [1 ]
机构：
[1] Inst. of Opt. and Fine. Mech., Chinese Acad. of Sci., Shanghai 201800, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2001年 / 21卷 / 07期
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学科分类号：
摘要：
Optical devices
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页码：853 / 856
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