Fourier-transform infrared and optical emission spectroscopy of CF4/O2/Ar mixtures in an inductively coupled plasma

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[1] [1,Cruden, Brett A.
[2] 1,Rao, M.V.V.S.
[3] Sharma, Surendra P.
[4] Meyyappan, M.
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Cruden, B.A. (bcruden@mail.arc.nasa.gov) | 1600年 / American Institute of Physics Inc.卷 / 93期
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