X-RAY MICROPROBE USING MULTILAYER MIRRORS.

被引：0

作者：

Underwood, J.H. ^{[1
]}

Thompson, A.C. ^{[1
]}

Wu, Y. ^{[1
]}

Giauque, R.D. ^{[1
]}

机构：

[1] Lawrence Berkeley Lab, Berkeley, CA,, USA, Lawrence Berkeley Lab, Berkeley, CA, USA

来源：

Nuclear instruments and methods in physics research | 1987年 / A266卷 / 1-3期

关键词：

MIRRORS; -; X-RAYS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

This paper reviews the design considerations for an X-ray microprobe, and summarizes experience with prototypes tested at both SSRL and NSLS. The optical systems described employ multilayer-coated spherical mirrors arranged in the Kirkpatrick-Baez configuration to demagnify the X-ray source by a factor of several hundred. By this means a spot of X-rays less than 10 mu m square can be produced. The optical aberrations and other factors that limit the performance are detailed, and possible ways to improve the performance are discussed. In the prototypes the spot is directed on the specimen which is carried on a stage that can be translated horizontally and vertically. The characteristic fluorescent X-rays excited by the focused 10 keV photons are analysed by an energy-dispersive Si(Li) detector, so that by scanning the stage an elemental concentration map of the specimen is built up.

引用

页码：296 / 302

共 50 条

[1] X-RAY MICROPROBE USING MULTILAYER MIRRORS
UNDERWOOD, JH
THOMPSON, AC
WU, Y
GIAUQUE, RD
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1988, 266 (1-3): : 296 - 302
[2] FOCUSSING OF SYNCHROTON RADIATION X-RAY BEAMS USING SYNTHETIC MULTILAYER MIRRORS.
Thompson, A.C.
Wu, Y.
Underwood, J.H.
Barbee Jr., T.W.
Nuclear instruments and methods in physics research, 1987, A255 (03): : 603 - 605
[3] EFFECT OF THE INTERFACIAL ROUGHNESS ON THE REFLECTION PROPERTIES OF MULTILAYER X-RAY MIRRORS.
Fraerman, A.A.
Gaponov, S.V.
Genkin, V.M.
Salashchenko, N.N.
Nuclear instruments and methods in physics research, 1986, A261 (1-2): : 91 - 98
[4] ADVANTAGES OF X-RAY REFLECTOMETRY EXPERIMENTS USING GOBEL MIRRORS.
LaPuma, P. J.
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 1996, 52 : C503 - C503
[5] MULTILAYER X-RAY MIRRORS
KOZHEVNIKOV, IV
VINOGRADOV, AV
JOURNAL OF RUSSIAN LASER RESEARCH, 1995, 16 (04) : 343 - 385
[6] X-ray microprobe with a pair of elliptical mirrors
Suzuki, Yoshio, 1660, (28):
[7] X-RAY MICROPROBE WITH A PAIR OF ELLIPTICAL MIRRORS
SUZUKI, Y
UCHIDA, F
HIRAI, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (09): : L1660 - L1662
[8] X-RAY MICROSCOPE WITH MULTILAYER MIRRORS
UNDERWOOD, JH
BARBEE, TW
FRIEBER, C
APPLIED OPTICS, 1986, 25 (11): : 1730 - 1732
[9] Replicated multilayer X-ray mirrors
Pína, L
Inneman, A
Hudec, R
Ticha, H
Patonov, Y
ADVANCES IN MIRROR TECHNOLOGY FOR X-RAY, EUV LITHOGRAPHY, LASER, AND OTHER APPLICATIONS, 2004, 5193 : 59 - 69
[10] On the theory of X-ray reflectivity by multilayer mirrors. II. Exactly solvable models of transition layer
Kohn, V.G.
2003, Nauka

← 1 2 3 4 5 →