Thin films of a Bi-Sr-Ca-Cu-O system were prepared on MgO substrate by coevaporation of Bi2O3, Sr0.5Ca0.5 alloy and Cu. The films were characterized by X-ray diffraction, dc resistivity and EPMA. By post-deposition annealing the film at 850°C for 12 hours, the film showed a superconducting transition with onset Tc of 91 K and zero resistance Tc of 82 K. The tetragonal phase Bi2 Sr2CaCu2Ox with a c-axis of 30.7 angstrom was responsible for this superconducting transition. The film annealed at 890°C for 5 hours showed a superconducting transition with onset Tc of 115 K and zero resistance Tc of 103 K. The tetragonal phase Bi2Sr2Ca2Cu3Ox with a c-axis of approximately 37 angstrom was responsible for this superconducting transition.