Investigation of the process factor space on bias-enhanced nucleation of diamond on silicon

被引：0
|
作者：
North Carolina State Univ, Raleigh, United States [1 ]
机构：
来源：
Thin Solid Films | / 1-2卷 / 4-11期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Microwave plasma enhanced chemical vapor deposition of nanocrystalline diamond films by bias-enhanced nucleation and bias-enhanced growth
    1600, American Institute of Physics Inc. (115):
  • [22] AC vs. DC bias-enhanced nucleation of highly oriented diamond on silicon (100)
    Wolter, SD
    Okuzumi, F
    Prater, JT
    Sitar, Z
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (02) : G114 - G117
  • [23] HIGHLY ORIENTED, TEXTURED DIAMOND FILMS ON SILICON VIA BIAS-ENHANCED NUCLEATION AND TEXTURED GROWTH
    STONER, BR
    SAHAIDA, SR
    BADE, JP
    SOUTHWORTH, P
    ELLIS, PJ
    JOURNAL OF MATERIALS RESEARCH, 1993, 8 (06) : 1334 - 1340
  • [24] Microstructural study of the alternating current bias-enhanced nucleation and growth of diamond on (001) silicon wafers
    Seong, TY
    Kim, DG
    Choi, KK
    Baik, YJ
    APPLIED PHYSICS LETTERS, 1997, 70 (25) : 3368 - 3370
  • [25] Bias-enhanced nucleation of diamond on molybdenum: A photoelectron spectroscopy study of the initial stages of the growth process
    Reinke, P
    Oelhafen, P
    JOURNAL OF APPLIED PHYSICS, 1998, 84 (05) : 2612 - 2617
  • [26] The chemical nature of the carbon precursor in bias-enhanced nucleation of CVD diamond
    Gouzman, I
    Fisgeer, B
    Avigal, Y
    Kalish, R
    Hoffman, A
    DIAMOND AND RELATED MATERIALS, 1997, 6 (2-4) : 526 - 531
  • [27] Bias-enhanced nucleation and textured growth of the diamond films on Si (100)
    J Shanghai Univ, 1 (4-6):
  • [28] Initial stage of bias-enhanced diamond nucleation induced by microwave plasma
    Yagi, H
    Hoshina, K
    Hatta, A
    Ito, T
    Sasaki, T
    Hiraki, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (4B): : L507 - L510
  • [29] Parametric study of bias-enhanced nucleation of diamond on platinum in microwave plasma
    Tachibana, T
    Yokota, Y
    Hayashi, K
    Miyata, K
    Kobashi, K
    Shintani, Y
    DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) : 251 - 255
  • [30] Ion acceleration in bias-enhanced nucleation of diamond at relatively high pressures
    Nose, K.
    Suwa, T.
    Ikejiri, K.
    Mitsuda, Y.
    DIAMOND AND RELATED MATERIALS, 2011, 20 (5-6) : 687 - 692
12345