Characterization of a permanent magnet electron cyclotron resonance plasma source

被引：0

作者：

Mantei, T.O. ^{[1
]}

Ohale, S. ^{[1
]}

机构：

[1] Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, OH 45221, United States

来源：

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics | 1991年 / 9卷 / 01期

关键词：

Permanent magnets;

D O I：

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学科分类号：

摘要：

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页码：26 / 28

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