Characterization of a permanent magnet electron cyclotron resonance plasma source

被引：0
|
作者：
Mantei, T.O. [1 ]
Ohale, S. [1 ]
机构：
[1] Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, OH 45221, United States
来源：
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics | 1991年 / 9卷 / 01期
关键词：
Permanent magnets;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：26 / 28
相关论文
共 50 条
  • [1] CHARACTERIZATION OF A PERMANENT-MAGNET ELECTRON-CYCLOTRON RESONANCE PLASMA SOURCE
    MANTEI, TD
    DHOLE, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (01): : 26 - 28
  • [2] Performance and modeling of a permanent magnet electron cyclotron resonance plasma source
    Saproo, A., 1600, AVS Science and Technology Society (13):
  • [3] PERFORMANCE AND MODELING OF A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE
    SAPROO, A
    MANTEI, TD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 883 - 886
  • [4] Plasma studies of the permanent magnet electron cyclotron resonance ion source at Peking University
    Ren, H. T.
    Peng, S. X.
    Xu, Y.
    Zhao, J.
    Lu, P. N.
    Chen, J.
    Zhang, A. L.
    Zhang, T.
    Guo, Z. Y.
    Chen, J. E.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (02):
  • [5] PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE WITH REMOTE WINDOW
    BERRY, LA
    GORBATKIN, SM
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (02): : 343 - 348
  • [6] CU DEPOSITION USING A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SOURCE
    BERRY, LA
    GORBATKIN, SM
    RHOADES, RL
    THIN SOLID FILMS, 1994, 253 (1-2) : 382 - 385
  • [7] Upgrade of the extraction system of permanent magnet electron cyclotron resonance ion source
    Zhang, M.
    Peng, S. X.
    Ren, H. T.
    Song, Z. Z.
    Yuan, Z. X.
    Zhou, Q. F.
    Lu, P. N.
    Xu, R.
    Zhao, J.
    Yu, J. X.
    Chen, J. E.
    Guo, Z. Y.
    Lu, Y. R.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
  • [8] Enhanced production of electron cyclotron resonance plasma by exciting selective microwave mode on a large-bore electron cyclotron resonance ion source with permanent magnet
    Kimura, Daiju
    Kurisu, Yosuke
    Nozaki, Dai
    Yano, Keisuke
    Imai, Youta
    Kumakura, Sho
    Sato, Fuminobu
    Kato, Yushi
    Iida, Toshiyuki
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (02):
  • [9] COMPACT ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE WITH A PERMANENT-MAGNET
    SHIMADA, M
    TORII, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1993, 11 (04): : 1313 - 1316
  • [10] An all permanent magnet electron cyclotron resonance ion source for heavy ion therapy
    Cao, Yun
    Li, Jia Qing
    Sun, Liang Ting
    Zhang, Xue Zhen
    Feng, Yu Cheng
    Wang, Hui
    Ma, Bao Hua
    Li, Xi Xia
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (02):
12345