Monte Carlo simulation of electron beam plasma in a silane-argon mixture
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Vasenkov, A.V.
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Inst. of Thermophysics and Physical, Dept. of Novosibirsk Stt. University, Novosibirsk 630090, RussiaInst. of Thermophysics and Physical, Dept. of Novosibirsk Stt. University, Novosibirsk 630090, Russia
Vasenkov, A.V.
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[1] Inst. of Thermophysics and Physical, Dept. of Novosibirsk Stt. University, Novosibirsk 630090, Russia