Preparation of SiC thin films by ion beam technology and PECVD

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作者：
Chen, Changqing
Ren, Congxin
Yang, Lixin
Yan, Jinlong
Zheng, Zhihong
Zhou, Zuyao
Chen, Ping
Liu, Xianghuai
Chen, Xueliang
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He Jishu/Nuclear Techniques | / 21卷 / 09期
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页码：519 / 524
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