Structure, Electrical and Optical Properties of Head Treated Titanium Nitride Amorphous Films

被引:0
|
作者
Tarniowy, A.
Mania, R.
Rckas, M.
机构
来源
Archives of Metallurgy | / 42卷 / 02期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] The effect of thermal treatment on the structure, optical and electrical properties of amorphous titanium nitride thin films
    Tarniowy, A
    Mania, R
    Rekas, M
    THIN SOLID FILMS, 1997, 311 (1-2) : 93 - 100
  • [2] Amorphous carbon nitride films:: Structure and electrical properties
    Radnóczi, G
    Sáfrán, G
    Kovács, I
    Geszti, O
    Bíró, L
    ACTA PHYSICA SLOVACA, 2000, 50 (06) : 679 - 684
  • [3] STRUCTURE AND ELECTRICAL-PROPERTIES OF TITANIUM NITRIDE FILMS
    IGASAKI, Y
    MITSUHASHI, H
    AZUMA, K
    MUTO, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (01) : 85 - 96
  • [4] ELECTRICAL-CONDUCTION IN AMORPHOUS TITANIUM NITRIDE FILMS
    BABUJI, B
    BALASUBRAMANIAN, C
    RADHAKRISHNAN, M
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1983, 2 (11) : 694 - 696
  • [5] OPTICAL AND ELECTRICAL PROPERTIES OF ION IMPLANTED TITANIUM NITRIDE THIN FILMS.
    Armigliato, A.
    Celotti, G.
    Garulli, A.
    Guerri, S.
    Ostoja, P.
    Summonte, C.
    Vide, les Couches Minces, 1983, 38 (218): : 401 - 404
  • [6] ELECTRICAL PROPERTIES OF TITANIUM NITRIDE THIN FILMS.
    Kawabata, Keishi
    Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E, 1983, E66 (08): : 488 - 492
  • [7] CORRELATION OF MICROSTRUCTURE AND COMPOSITION OF SPUTTERED TITANIUM NITRIDE FILMS WITH ELECTRICAL AND OPTICAL-PROPERTIES
    THORPE, TP
    ELAM, WT
    MORRISH, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1652 - 1654
  • [8] Structure and electrical properties of pulsed laser deposited amorphous carbon nitride thin films
    Aoi, Y
    Ono, K
    Sakurada, K
    Kamijo, E
    SURFACE ENGINEERING 2002-SYNTHESIS, CHARACTERIZATION AND APPLICATIONS, 2003, 750 : 285 - 290
  • [9] Oxidation-Resistant Amorphous Zinc Tin Nitride Films with Tunable Optical and Electrical Properties
    Choi, Ji Woon
    Kim, Jekyung
    Pae, Seong Ryul
    Kim, Joonyun
    Kim, Chang Gyun
    Lee, Hojin
    Ji, Seunghwan
    Nam, Sung-Wook
    Lee, Young Kuk
    Shin, Byungha
    CHEMISTRY OF MATERIALS, 2022, 34 (15) : 6802 - 6808
  • [10] Doping and electrical properties of amorphous silicon carbon nitride films
    Chou, YC
    Chattopadhyaya, S
    Chen, LC
    Chen, YF
    Chen, KH
    DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 1213 - 1219