Hot electron capture in Si3N4

被引:0
|
作者
Vorontsov, V.V. [1 ]
Efimov, V.M. [1 ]
Sinitsa, S.P. [1 ]
机构
[1] Acad of Sciences of the USSR, Russia
来源
Soviet microelectronics | 1990年 / 18卷 / 03期
关键词
Dielectric Materials - Electromagnetic Waves - Scattering - Electrons - Transport Properties - Semiconductor Devices - Structures - Silicon Nitride - Electric Field Effects;
D O I
暂无
中图分类号
学科分类号
摘要
The behavior of hot electrons in silicon nitride is studied. Quantitative data is obtained on the change in hot electron capture section by studying the dependence of the captured charge centroid upon initial energy of electrons injected into the dielectric. It is concluded that in silicon nitride in strong electric fields electrons do not heat up as they do in silicon dioxide, but are localized by deep charge centers.
引用
收藏
页码:127 / 131
相关论文
共 50 条
  • [1] HOT-ELECTRON CAPTURE IN SI3N4
    VORONTSOV, VV
    EFIMOV, VM
    SINITSA, SP
    SOVIET MICROELECTRONICS, 1989, 18 (03): : 127 - 131
  • [2] HOT-PRESSED SI3N4
    GAZZA, GE
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1973, 56 (12) : 662 - 662
  • [3] ELECTRICAL CHARACTERISTICS OF HOT-PRESSED SI3N4, MGO/SI3N4 AND AL2O3/SI3N4 CERAMICS
    SHARIF, RI
    THORP, JS
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1987, 6 (06) : 686 - 688
  • [4] MECHANICAL-PROPERTIES OF HOT ISOSTATICALLY PRESSED SI3N4 AND SI3N4/SIC COMPOSITES
    UNAL, O
    PETROVIC, JJ
    MITCHELL, TE
    JOURNAL OF MATERIALS RESEARCH, 1993, 8 (03) : 626 - 634
  • [5] HOT ISOSTATIC PRESSING OF SI3N4 POWDER COMPACTS AND REACTION-BONDED SI3N4
    HEINRICH, J
    BACKER, E
    BOHMER, M
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1988, 71 (01) : C28 - C31
  • [6] HOT-PRESSING BEHAVIOR OF SI3N4
    TERWILLIGER, GR
    LANGE, FF
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1974, 57 (01) : 25 - 29
  • [7] MICROSTRUCTURAL ASPECTS OF HOT PRESSED SI3N4
    KOSSOWSKY, R
    AMERICAN CERAMIC SOCIETY BULLETIN, 1972, 51 (08): : 656 - +
  • [8] FABRICATION OF SI3N4 BY HOT ISOSTATIC PRESSING
    YAMADA, T
    SHIMADA, M
    KOIZUMI, M
    AMERICAN CERAMIC SOCIETY BULLETIN, 1981, 60 (11): : 1225 - 1228
  • [9] CREEP IN HOT-PRESSED SI3N4
    KOSSOWSK.R
    AMERICAN CERAMIC SOCIETY BULLETIN, 1974, 53 (04): : 321 - 321
  • [10] CONSOLIDATION OF SI3N4 BY HOT ISOSTATIC PRESSING
    YEH, HC
    SIKORA, PF
    AMERICAN CERAMIC SOCIETY BULLETIN, 1979, 58 (04): : 444 - 447