TEST SYSTEM FOR PROCESS MONITORING.

To meet the increasing requirements for water analysis and process monitoring within wafer modules, Eaton Corporation has produced a new automatic test system which it calls Waferspec. The system is designed to provide high accuracy and sophisticated testing at high speed. The system's speed allows higher throughput or more testing per wafer. Its accuracy, low picoamp capability and low-frequency capacitance testing are important in both laboratory and production environments.