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EVAPORATION CHARACTERISTICS OF MATERIALS FROM AN ELECTRON-BEAM GUN
被引：0
作者：
GRAPER EB
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来源：
|
1971年
/
8卷
/
01期
关键词：
ELECTRON BEAMS;
ELECTRON GUN - FILMS - JVSTA - PREPARATION;
D O I：
暂无
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学科分类号：
摘要：
Data are given for electron-beam evaporation characteristics of 32 metals and compounds most commonly used in thin film processes. For a commercially available 6-kw, 180//0 bent- beam gun, data are provided for deposition rate, required beam power, charge material form, and suitability for evaporation. Methods of increasing evaporation rate of power-limited materials are also explored.
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页码：333 / 337
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