RESISTIVITY OF THIN METAL FILMS.

被引：0
|
作者：
Chaurasia, H.K.
Voss, W.A.G.
机构：
来源：
| 1600年 / MTT-2期
关键词：
FILMS; -; Metallic;
D O I：
10.1109/tmtt.1973.1127915
中图分类号：
学科分类号：
摘要：
It is shown that the sheet resistance, and hence the resistivity, of metal films less than 100 A thick can be determined conveniently and accurately by microwave measurements. Accuracy is limited by VSWR measurement, film-holder design, and short-circuit quality. Dc and microwave resistivity measurements are given for gold films on cleaved mica.
引用
收藏
相关论文
共 50 条
  • [41] Optimization of phthalocyanine thin films.
    Cheng, CH
    Gragson, D
    Baker, SM
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 217 : U361 - U361
  • [42] TRANSVERSE E-TYPE QUANTUM WAVES IN THIN METAL FILMS.
    Katsnel'son, M.I.
    Okulov, V.I.
    Physics of Metals and Metallography, 1978, 46 (01): : 194 - 196
  • [43] STRUCTURE AND GROWTH OF THIN FILMS.
    VOOK, R.W.
    1982, V 27 (N 4): : 209 - 245
  • [44] Curved ferromagnetic thin films.
    Zorgati, H
    COMPTES RENDUS MATHEMATIQUE, 2005, 340 (01) : 81 - 86
  • [45] REFLECTIVITY OF TELLURIUM THIN FILMS.
    Jain, I.P.
    Indian Journal of Pure and Applied Physics, 1983, 21 (04): : 211 - 215
  • [46] Thermodynamics of thin polymer films.
    Rajagopalan, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 225 : U672 - U672
  • [47] INDENTATION MEASUREMENTS ON THIN FILMS.
    Wierenga, P.E.
    Franken, A.J.J.
    Philips Technical Review, 1985, 42 (03): : 85 - 92
  • [48] THIN METAL FILMS IN RESISTIVITY-BASED CHEMICAL SENSING
    Podesva, Pavel
    Foret, Frantisek
    CECE 2012: 9TH INTERNATIONAL INTERDISCIPLINARY MEETING ON BIOANALYSIS, 2012, : 73 - 75
  • [49] RESISTIVITY AND TEMPERATURE COEFFICIENT OF THIN METAL FILMS WITH ROUGH SURFACE
    NAMBA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (11) : 1326 - &
  • [50] Thin Metal Films in Resistivity-based Chemical Sensing
    Podesva, Pavel
    Foret, Frantisek
    CURRENT ANALYTICAL CHEMISTRY, 2013, 9 (04) : 642 - 652
12345