RESISTIVITY OF THIN METAL FILMS.

被引：0

作者：

Chaurasia, H.K.

Voss, W.A.G.

机构：

来源：

| 1600年 / MTT-2期

关键词：

FILMS; -; Metallic;

D O I：

10.1109/tmtt.1973.1127915

中图分类号：

学科分类号：

摘要：

It is shown that the sheet resistance, and hence the resistivity, of metal films less than 100 A thick can be determined conveniently and accurately by microwave measurements. Accuracy is limited by VSWR measurement, film-holder design, and short-circuit quality. Dc and microwave resistivity measurements are given for gold films on cleaved mica.

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