Deposition and microstructure of PVD TiN-NbN multilayered coatings by combined reactive electron beam evaporation and DC sputtering

被引：0

作者：

Larsson, Mats ^{[1
]}

Hollman, Patrik ^{[1
]}

Hedenqvist, Per ^{[1
]}

Hogmark, Sture ^{[1
]}

Wahlstrom, Ulf ^{[1
]}

Hultman, Lars ^{[1
]}

机构：

[1] Uppsala Univ, Uppsala, Sweden

来源：

Surface and Coatings Technology | 1996年 / 86-87卷 / 1 -3 pt 1期

关键词：

Dr LeifWestin of Erasteel Kloster AB and Mr Lennart Karlsson of SECO Tools AB are recognised for provid- ing the substrate materials. In addition; Dr Nils Lundberg; Royal Institute of Technology; Sweden; is acknowledged for his assistance with the RBS analysis. The financial support from the National Swedish Board for Technical and Industrial Development (NUTEK) is gratefully acknowledged by the authors;

D O I：

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中图分类号：

学科分类号：

摘要：

引用

页码：351 / 356

共 16 条

[1] Deposition and microstructure of PVD TiN-NbN multilayered coatings by combined reactive electron beam evaporation and DC sputtering
Larsson, M
Hollman, P
Hedenqvist, P
Hogmark, S
Wahlstrom, U
Hultman, L
SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3): : 351 - 356
[2] PHYSICAL VAPOR-DEPOSITION (PVD) PROCESS (ELECTRON-BEAM EVAPORATION AND SPUTTERING)
RAY, AK
TRANSACTIONS OF THE METAL FINISHERS ASSOCIATION OF INDIA, 1995, 4 (01): : 49 - 55
[3] Synthesis of TiN–Cu Nanocomposite Coatings Using Combined Vacuum-Arc Evaporation, Magnetron Sputtering, and Ion Beam Sputtering
A. P. Semenov
D. B.-D. Tsyrenov
I. A. Semenova
Russian Metallurgy (Metally), 2023, 2023 : 303 - 305
[4] Microstructural evolution of titanium nitride (TiN) coatings produced by reactive ion beam-assisted, electron beam physical vapor deposition (RIBA, EB-PVD)
Wolfe, DE
Singh, J
JOURNAL OF MATERIALS SCIENCE, 1999, 34 (12) : 2997 - 3006
[5] Microstructural evolution of titanium nitride (TiN) coatings produced by reactive ion beam-assisted, electron beam physical vapor deposition (RIBA, EB-PVD)
Applied Research Laboratory, Pennsylvania State University, State College, PA 16804, United States
J Mater Sci, 12 (2997-3006):
[6] Microstructural evolution of titanium nitride (TiN) coatings produced by reactive ion beam-assisted, electron beam physical vapor deposition (RIBA, EB-PVD)
D. E. Wolfe
J. Singh
Journal of Materials Science, 1999, 34 : 2997 - 3006
[7] Synthesis of TiN-Cu Nanocomposite Coatings Using Combined Vacuum-Arc Evaporation, Magnetron Sputtering, and Ion Beam Sputtering
Semenov, A. P.
Tsyrenov, D. B. -D.
Semenova, I. A.
RUSSIAN METALLURGY, 2023, 2023 (03): : 303 - 305
[8] Influence of processing on microstructure and performance of electron beam physical vapor deposition (EB-PVD) thermal barrier coatings
Schulz, U
Fritscher, K
Leyens, C
Peters, M
JOURNAL OF ENGINEERING FOR GAS TURBINES AND POWER-TRANSACTIONS OF THE ASME, 2002, 124 (02): : 229 - 234
[9] The advantages of evaporation of Hafnium in a reactive environment to manufacture high damage threshold multilayer coatings by electron-beam deposition
Stolz, CJ
Sheehan, LM
von Gunten, MK
Bevis, RP
Smith, DJ
ADVANCES IN OPTICAL INTERFERENCE COATINGS, 1999, 3738 : 318 - 324
[10] Synthesis and characterization of TiBCN coatings deposited by ion beam assisted, co-evaporation electron beam-physical vapor deposition (EB-PVD)
D. E. Wolfe
J. Singh
Journal of Materials Science, 2002, 37 : 3777 - 3787

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