Effect of added ethanol in atmospheric-pressure chemical vapor deposition reaction using tetraethoxysilane and ozone

被引：0
|
作者：
机构：
[1] Maeda, Masahiko
[2] Ikeda, Koichi
来源：
Maeda, Masahiko | 1600年 / JJAP, Minato-ku, Japan卷 / 33期
关键词：
Atmospheric pressure - Composition effects - Dielectric materials - Electric connectors - Ethanol - Molecular structure - Ozone - Silanes - VLSI circuits;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Ethanol added in tetraethoxysilane (TEOS)-ozone (O3) atmospheric-pressure chemical vapor deposition (APCVD) reaction is found to affect both deposition rate and step coverage characteristics. The added ethanol decreases the effective ozone concentration in the gas phase; that is, it acts as an ozone scavenger. In the region of flow-shaped step coverage, both the deposition rate and step coverage were enhanced simultaneously. These results suggest that the added ethanol also contributes to the formation of reaction intermediates which affect the flow-shaped step coverage. In addition, it is considered that reaction between these intermediates and ozone molecules is necessary for flow-shaped step coverage.
引用
收藏
相关论文
共 50 条
12345