Ion sources for microsize ion-beam treatment of optical parts

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作者
Michnev, R.A. [1 ]
Shtandel, S.K. [1 ]
Belokurov, A.P. [1 ]
Martynov, M.I. [1 ]
机构
[1] OAC Lytkarino Optical Glass Factory, Moskovskaya, Russia
来源
Review of Scientific Instruments | 1998年 / 69卷 / 2 pt 2期
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页码:899 / 901
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