Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance

被引：0
作者：
Raynaud, P. [1 ]
Marliere, C. [1 ]
Berthomieux, D. [1 ]
Segui, Y. [1 ]
Durand, J. [1 ]
Burke, R. [1 ]
机构：
[1] Universite Paul Sabatier, Toulouse, France
来源：
Journal De Physique. IV : JP | 1998年 / 8卷 / 07期
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页码：265 / 272
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