共 50 条
- [11] Shock tube study of the thermal decomposition of Si2H6 based on Si and SiH2 measurements Berichte der Bunsengesellschaft/Physical Chemistry Chemical Physics, 1995, 99 (06):
- [12] Arrhenius parameters for the reaction of H atoms with SiH4 JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS, 1997, 93 (24): : 4259 - 4264
- [19] A SHOCK-TUBE STUDY OF THE THERMAL-DECOMPOSITION OF SI2H6 BASED ON SI AND SIH2 MEASUREMENTS BERICHTE DER BUNSEN-GESELLSCHAFT-PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1995, 99 (06): : 880 - 890
- [20] Monitoring of the intermediate products in the thermal decomposition of SiH4, Si2H6, SiF4 and SiH2F2 DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II, 1996, 406 : 39 - 44