Evaluation of a dry laser cleaning process for the removal of surface particles

被引：0
|
作者：
Vereecke, G. [1 ]
Rohr, E. [1 ]
Heyns, M.M. [1 ]
机构：
[1] Interuniversity Microelectronics, Cent, Leuven, Belgium
来源：
Solid State Phenomena | 1999年 / 65-66卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：187 / 190
相关论文
共 50 条
  • [1] Evaluation of a dry laser cleaning process for the removal of surface particles
    Vereecke, G
    Röhr, E
    Heyns, MM
    SOLID STATE PHENOMENA, 1999, 65-6 : 187 - 190
  • [2] Evaluation of a dry laser cleaning process
    Vereecke, G
    Rohr, E
    Heyns, MM
    INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY, 1998 PROCEEDINGS - CONTAMINATION CONTROL, 1998, : 202 - 209
  • [3] Influence of beam incidence angle on dry laser cleaning of surface particles
    Vereecke, G
    Röhr, E
    Heyns, MM
    APPLIED SURFACE SCIENCE, 2000, 157 (1-2) : 67 - 73
  • [4] Angular laser cleaning for effective removal of particles from a solid surface
    Lee, JM
    Watkins, KG
    Steen, WM
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 71 (06): : 671 - 674
  • [5] Removal versus ablation in KrF dry laser cleaning of polystyrene particles from silicon
    Kudryashov, SI
    Allen, SD
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (09) : 5159 - 5162
  • [6] SURFACE CLEANING BY ELECTROSTATIC REMOVAL OF PARTICLES
    COOPER, DW
    WOLFE, HL
    YEH, JTC
    MILLER, RJ
    AEROSOL SCIENCE AND TECHNOLOGY, 1990, 13 (01) : 116 - 123
  • [7] SURFACE CLEANING BY ELECTROSTATIC REMOVAL OF PARTICLES
    COOPER, DW
    WOLFE, HL
    YEH, JTC
    MILLER, RJ
    1989 PROCEEDINGS :: 35TH ANNUAL TECHNICAL MEETING - BUILDING TOMORROWS ENVIRONMENT, 1989, : 334 - 339
  • [8] Angular laser cleaning for effective removal of particles. from a solid surface
    J.M. Lee
    K.G. Watkins
    W.M. Steen
    Applied Physics A, 2000, 71 : 671 - 674
  • [9] Removal mechanisms of micro-scale particles by surface wave in laser cleaning
    Hsu, SC
    Lin, JM
    OPTICS AND LASER TECHNOLOGY, 2006, 38 (07): : 544 - 551
  • [10] Dynamics of particles removal in laser shock cleaning
    Zhang, Ping
    Bian, Bao-Min
    Li, Zhen-Hua
    HIGH-POWER LASER ABLATION VI, PTS 1 AND 2, 2006, 6261
12345