Simulation of adsorption-induced stress of a microcantilever sensor

被引：0

作者：

Dareing, Don W. ^{[1
]}

Thundat, Thomas ^{[2
]}

机构：

[1] Department of Mechanical Engineering, University of Tennessee, Knoxville, TN 37996, United States

[2] Oak Ridge National Laboratory, Oak Ridge, TN 37831, United States

来源：

Journal of Applied Physics | 2005年 / 97卷 / 04期

关键词：

Number:; DE-AC05-00OR22725; Acronym:; USDOE; Sponsor: U.S. Department of Energy; -; ORNL; Sponsor: Oak Ridge National Laboratory;

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