Device for movement of specimen holder from air lock to manipulator of ultrahigh-vacuum chamber

被引：0
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作者：
Isaev, A.A.
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来源：
Instruments and experimental techniques New York | 1988年 / 30卷 / 6 pt 2期
关键词：
Clamps - Motion Control - Rack Mechanisms - Specimen Holders - Vacuum Chambers;
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学科分类号：
摘要：
(Edited Abstract)
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页码：1487 / 1488
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