BORON DOPING TO MICROCRYSTALLINE SiNx:H FILMS.

被引：0
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作者：
Hasegawa, Seiichi [1 ]
Segawa, Mizuki [1 ]
Kurata, Yoshihiro [1 ]
机构：
[1] Kanazawa Univ, Kanazawa, Jpn, Kanazawa Univ, Kanazawa, Jpn
来源：
| 1600年 / 25期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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摘要：
SEMICONDUCTING SILICON
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