Atomic layer epitaxy of III-V compounds in a hydride vapor phase system

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[1] Ahopelto, J.
[2] Kattelus, H.P.
[3] Saarilahti, J.
[4] Suni, I.
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Ahopelto, J. | 1600年 / 99期
关键词：
Atomic Layer Epitaxy - Organometallic Vapor Phase Epitaxy;
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