TUNGSTEN DISILICIDE FORMATION IN CODEPOSITED AMORPHOUS WSix ALLOY THIN FILMS.

被引：0
|
作者：
Nava, F. [1 ]
Weiss, B.Z. [1 ]
Ahn, K. [1 ]
Tu, K.N. [1 ]
机构：
[1] Univ di Modena, Modena, Italy, Univ di Modena, Modena, Italy
来源：
Vide, les Couches Minces | 1987年 / 42卷 / 236期
关键词：
RESISTIVITY MAXIMUM - SHEET RESISTIVITY - TUNGSTEN DISILICIDE;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：225 / 228
相关论文
共 50 条
  • [1] TUNGSTEN DISILICIDE FORMATION IN CODEPOSITE AMORPHOUS WSIX ALLOY THIN-FILMS
    NAVA, F
    WEISS, BZ
    AHN, K
    TU, KN
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1987, 42 (236): : 225 - 228
  • [2] Raman study of tungsten disilicide formation in thin films
    Chaix-Pluchery, O
    Lucazeau, G
    Aubry-Fortuna, V
    Meyer, F
    Madar, R
    MICROELECTRONIC ENGINEERING, 1997, 37-8 (1-4) : 543 - 550
  • [3] Raman study of tungsten disilicide formation in thin films
    Chaix-Pluchery, O.
    Lucazeau, G.
    Meyer, F.
    Aubry-Fortuna, V.
    Madar, R.
    Vide: Science, Technique et Applications, 1997, 53 (283 SUPPL.): : 176 - 177
  • [4] Formation of Silicides in Thin Tungsten or Molybdenum Films.
    Oertel, Bernd
    Wissenschaftliche Zeitschrift - Technische Hochschule Ilmenau, 1979, 25 (06): : 151 - 156
  • [5] Texture formation in Ti-Ta alloy disilicide thin films
    Özcan, AS
    Ludwig, KF
    Cabral, C
    Lavoie, C
    Harper, JME
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (12) : 7210 - 7218
  • [6] XRD Analysis of Tungsten Thin Films.
    Djerdj, I.
    Tonejc, A. M.
    Tonejc, A.
    Radic, N.
    ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2004, 60 : S242 - S242
  • [7] INVESTIGATON OF THE STRENGTH OF THIN TUNGSTEN FILMS.
    Garber, R.I.
    Geysherik, V.S.
    Mikhaylovskiy, I.M.
    Fedorova, L.I.
    1600, (42):
  • [8] PREPARATION OF TUNGSTEN DISILICIDE THIN-FILMS BY LASER EVAPORATION
    GLEBOVSKY, VG
    OGANYAN, RA
    ERMOLOV, SN
    STINOV, ED
    KOLOSOVA, EV
    THIN SOLID FILMS, 1994, 239 (02) : 192 - 195
  • [9] PHOTOELECTRIC PROPERTIES OF AMORPHOUS SILICON THIN FILMS.
    Nakaue, Akimitsu
    Kajikawa, Hiroshi
    Ohnishi, Yoshihiko
    Hirai, Yo
    R and D: Research and Development Kobe Steel Engineering Reports, 1988, 38 (02): : 69 - 72
  • [10] MAGNETIC CHARACTERISTICS OF CoZrNb AMORPHOUS THIN FILMS.
    Watanabe, Y.
    Furuya, N.
    Nakayama, Y.
    IEEE translation journal on magnetics in Japan, 1984, TJMJ-1 (06): : 749 - 751
12345