Chemical mechanical polishing (CMP) in magnetic float polishing (MFP) of advanced ceramic (silicon nitride) and glass (silicon dioxide)

被引：0

作者：

Jiang, M. ^{[1
]}

Komanduri, R. ^{[1
]}

机构：

[1] Mechanical and Aerospace Engineering, Oklahoma State University, Stillwater, OK 74078, United States

来源：

关键词：

High speed bearings - Magnetic float polishing (MFP);

D O I：

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摘要：

(Edited Abstract)

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