Formation and electrical properties of ferroelectric Pb(Zr, Ti)O3 thin films by spin-coating and pyrolysis of metal naphthenates

被引:5
作者
Okamura, Soichiro [1 ]
Kakimi, Atsushi [1 ]
Tsukamoto, Takeyo [1 ]
机构
[1] Science Univ of Tokyo, Tokyo, Japan
来源
Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan | 1995年 / 103卷
关键词
Coating techniques - Coercive force - Crystallization - Dielectric properties of solids - Heat treatment - Lead compounds - Perovskite - Polarization - Pyrolysis - Remanence - Thin films - Zirconium compounds;
D O I
10.2109/jcersj.103.202
中图分类号
学科分类号
摘要
The formation of ferroelectric Pb(Zr, Ti)O3 thin films was carried out by spin-coating and pyrolysis of the metal naphthenates. The solution for spin-coating was prepared by mixing Pb, Zr and Ti naphthenates at the Pb:Zr:Ti molar ratio of 1.05:0.52:0.48. Homogenous precursor films spin-coated on Pt plates were heat-treated in air at 500 °C for 5 min for crystallization into the single-phase ferroelectric perovskite Pb(Zr, Ti)O3. The resultant film shows good ferroelectric properties: the coercive field Ec and the remanent polarization Pr were estimated to be 39 kV/cm and 24 μC/cm2, respectively.
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页码:202 / 204
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