Characterization and optimization of a laser generated plasma source of soft X-rays

被引：0
|
作者：
Rogoyski, A.M. [1 ]
Charalambous, P. [1 ]
Hills, C.P. [1 ]
Michette, A.G. [1 ]
机构：
[1] Kings Coll, United Kingdom
来源：
Laser and Particle Beams | 1988年 / 6 pt 2卷
关键词：
Aluminum and Alloys - Carbon - Copper and Alloys - Lithography - Plasmas;
D O I：
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中图分类号：
学科分类号：
摘要：
An investigation into the feasibility of using a laser-generated plasma source of soft X rays as a laboratory based instrument for biological imaging and microlithography is presented. A preliminary characterization of the source has been carried out with carbon, copper and aluminum targets with specific interest in generating a monochromatic source of soft X rays in the 'water window'. Measurements of X-ray production with respect to angular distribution, effects of cratering and different focusing conditions are reported. Initial conclusions on the optimization of the source for use in biological imaging are drawn.
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页码：225 / 234
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