Design and fabrication of diffractive microlens arrays on Si substrates for 128×128 PtSi infrared focal plane arrays

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Huazhong Univ of Science and, Technology, Wuhan, China [1 ]
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Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves | 2000年 / 19卷 / 03期
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