Evaluation of mechanical materials properties by means of surface micromachined structures

被引：0
|
作者：
Schweitz, Jan-Åke [1 ]
Ericson, Fredric [1 ]
机构：
[1] Department of Materials Science, Angstrom Lab., Uppsala Univ., B., Uppsala, Sweden
来源：
Sensors and Actuators, A: Physical | 1999年 / 74卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：126 / 133
相关论文
共 50 条
  • [31] Mechanical characterization of surface micromachined microneedle array
    Chandrasekaran, S
    Frazier, AB
    2ND ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS, 2002, : 94 - 98
  • [32] MECHANICAL AND OPTICAL-PROPERTIES OF SURFACE MICROMACHINED TORSIONAL MIRRORS IN SILICON, POLYSILICON AND ALUMINUM
    JAECKLIN, VP
    LINDER, C
    BRUGGER, J
    DEROOIJ, NF
    MORET, JM
    VUILLEUMIER, R
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) : 269 - 275
  • [33] Bulk/Surface Micromachined PolyMEMS Test Chip for the Characterization of Electrical, Mechanical and Thermal Properties
    Quinones-N, F. J.
    Diaz-A, D.
    Calleja-A, W.
    De la Hidalga-W, F. J.
    Malik, O.
    Reyes-B, C.
    Molina-R, J.
    Moreno-M, M.
    Zuniga-, C., I
    Rosales-Q, P.
    2014 INTERNATIONAL CARIBBEAN CONFERENCE ON DEVICES, CIRCUITS AND SYSTEMS (ICCDCS), 2014,
  • [34] Evaluation of mechanical properties and strain criterion for realibility design of micromachined polysilicon thin films
    Ding, JN
    Yang, JC
    Cai, L
    Wen, SZ
    INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION, 2002, 3 (3-4) : 657 - 660
  • [35] Electrical and mechanical properties of micromachined vacuum cavities
    Kiihamaki, J.
    Ronkainen, H.
    Haara, A.
    Mattila, T.
    PHYSICA SCRIPTA, 2004, T114 : 195 - 198
  • [36] Materials and Structures Integrated Methods for Design and Evaluation of Mechanical Components
    Zhang L.
    Chen G.
    Broeckmann C.
    Chang C.
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2021, 57 (22): : 1 - 2
  • [37] Study of mechanical properties of micromachined dental implants
    York, Richard
    Doumit, Marc
    Nganbe, Michel
    Helal, Alexander
    CANADIAN METALLURGICAL QUARTERLY, 2019, 58 (01) : 56 - 68
  • [38] Estimation of the mechanical properties of metallic materials by means of the small punch test
    Garcia, T. E.
    Rodriguez, C.
    Belzunce, F. J.
    Suarez, C.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2014, 582 : 708 - 717
  • [39] Characterization of mechanical properties in surface-treated materials
    Batista, AC
    Dias, AM
    JOURNAL OF TESTING AND EVALUATION, 2000, 28 (03) : 217 - 223
  • [40] Characterization of Mechanical Properties in Surface-Treated Materials
    Batista, Antonio C.
    Dias, Antonio M.
    2000, American Society for Testing and Materials (28)
12345