Evaluation of mechanical materials properties by means of surface micromachined structures

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作者：
Schweitz, Jan-Åke [1 ]
Ericson, Fredric [1 ]
机构：
[1] Department of Materials Science, Angstrom Lab., Uppsala Univ., B., Uppsala, Sweden
来源：
Sensors and Actuators, A: Physical | 1999年 / 74卷 / 01期
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页码：126 / 133
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