Diffusion of phosphorus in relaxed Si1-xGex films and strained Si/Si1-xGex heterostructures

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[1] Christensen, J.S.
[2] Radamson, H.H.
[3] 1,Kuznetsov, A.Yu.
[4] 1,Svensson, B.G.
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Christensen, J.S. (jens@imit.kth.se) | 1600年 / American Institute of Physics Inc.卷 / 94期
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