Amorphous state Al2O3 electron transmission film to the input of MCP

被引：0

作者：

Changchun Coll of Optics & Fine, Mechanics, Changchun, China ^{[1
]}

机构：

来源：

Tien Tzu Hsueh Pao | / 7卷 / 1-5期

关键词：

Image intensifiers (solid state);

D O I：

暂无

中图分类号：

TN3 [半导体技术]; TN4 [微电子学、集成电路（IC）];

学科分类号：

0805 ; 080501 ; 080502 ; 080903 ; 1401 ;

摘要：

This paper introduces the function of amorphous state Al2O3 electron transmission film at the input of MCP in the imaging devices, expounds the selection, forming condition and method of the film, gives the relation between film forming and glow discharge of the gases. Some characteristics of the film and MCP with film are measured. Preliminary analysis and discussion about it are carried out.

引用