SIMULATION OF FOCUSED ION BEAM MILLING.

被引：0
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作者：
Mueller, K.P. [1 ]
Weigmann, U. [1 ]
Burghause, H. [1 ]
机构：
[1] Fraunhofer Inst fuer, Mikrostrukturtechnik, Berlin, West, Ger, Fraunhofer Inst fuer Mikrostrukturtechnik, Berlin, West Ger
来源：
| 1600年 / 05期
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摘要：
ION BEAMS
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