Surface plasmon spectroscopy for measuring surface roughness of metallic film

被引：0

作者：

Fudan Univ, Shanghai, China ^{[1
]}

机构：

来源：

Guangxue Xuebao | / 4卷 / 474-480期

关键词：

Mechanical variables measurement - Plasmas - Roughness measurement - Scattering - Silver - Surface roughness;

D O I：

暂无

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学科分类号：

摘要：

A method for determining the surface roughness parameters of metal film with surface plasmon spectroscopy is proposed. The angular distribution of scattering light intensity from two kinds of silver films (including prism/silver film/air and prism/LB film/silver film/air) is measured under the condition that surface plasmon is excited between the silver and air. By fitting the experimental data with the calculating theoretical curves, the characterization parameters for stochastic rough interface are obtained.

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