Nanoindentation investigation of Ti/TiN multilayers films

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作者：
Daia, M. Ben
Aubert, P.
Labdi, S.
Sant, C.
Sadi, F.A.
Houdy, Ph.
Bozet, J.L.
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| 1600年 / American Inst of Physics, Woodbury, NY, USA卷 / 87期
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