共 50 条
- [34] SCHOTTKY-BARRIER STUDY OF ION-IMPLANTATION DAMAGE IN GAAS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (04): : 2280 - 2292
- [38] Micro-Raman and ion channeling study of crystal damage in Si induced by focused Co ion beam implantation Applied Physics A: Materials Science and Processing, 2000, 71 (02): : 175 - 180