Application of arsenic doped polycrystalline silicon for microwave transistors

被引:0
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作者
Zhang, Shudan [1 ]
Chen, Tonghua [1 ]
机构
[1] Nanjing Electronic Devices Inst, Nanjing, China
关键词
Microwave transistors - Polycrystalline silicon;
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页码:241 / 245
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