Reshaping of single-crystal silicon microstructures

被引：0

作者：

Yang, Eui-Hyeok ^{[1
]}

Fujita, Hiroyuki ^{[1
]}

机构：

[1] Jet Propulsion Lab, Pasadena, United States

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 3 A期

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摘要：

This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.

引用

页码：1580 / 1583