CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminum etching

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Dept. of Solid State Electronics, Chalmers Univ. of Technol., S-412 96, Göteborg, Sweden [1 ]
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Sens Actuators A Phys | / 3卷 / 243-251期
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Number:; -; Acronym:; Sponsor: Bayerisches Staatsministerium für Bildung und Kultus; Wissenschaft und Kunst; 93.0161; Sponsor:;
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