SPUTTERING OF Cu ATOMS BY Ar IONS.

被引:0
作者
Likonen, J. [1 ]
Hautala, M. [1 ]
机构
[1] Technical Research Cent of Finland, Espoo, Finl, Technical Research Cent of Finland, Espoo, Finl
来源
Applied physics. A, Solids and surfaces | 1988年 / A 45卷 / 02期
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学科分类号
摘要
COPPER AND ALLOYS
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页码:137 / 150
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