SPUTTERING OF Cu ATOMS BY Ar IONS.

被引：0

作者：

Likonen, J. ^{[1
]}

Hautala, M. ^{[1
]}

机构：

[1] Technical Research Cent of Finland, Espoo, Finl, Technical Research Cent of Finland, Espoo, Finl

来源：

Applied physics. A, Solids and surfaces | 1988年 / A 45卷 / 02期

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D O I：

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学科分类号：

摘要：

COPPER AND ALLOYS

引用

页码：137 / 150

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