Experiments using a nano-machining instrument for nano-cutting brittle materials

被引：1

作者：

Department of Mechatronics, Tohoku University, Sendai, Japan ^{[1
]}

不详 ^{[2
]}

机构：

[1] Department of Mechatronics, Tohoku University, Sendai

[2] Center for Precision Metrology, Univ. of North Carolina at Charlotte, Charlotte

来源：

CIRP Annals - Manufacturing Technology | 2000年 / 49卷 / 01期

基金：

美国国家科学基金会;

关键词：

Brittleness - Capacitance - Cutting equipment - Feedback control - Piezoelectric devices - Probes;

D O I：

10.1016/S0007-8506(07)62984-9

中图分类号：

学科分类号：

摘要：

This paper presents a nano-machining instrument, which was developed for conducting nano-cutting experiments especially on brittle materials. A PZT tube scanner is employed to accomplish a maximum depth of cut of 4 μm with 0.1 nm resolution, and a length of cut of 20 μm. The cutting motions are feedback-controlled by using the output of a capacitance probe. There are two force sensors to measure thrust and cutting forces with a resolution of sub-milliNewtons. The sample is kinematically mounted on the PZT scanner, and the tilt of the sample can be adjusted precisely. Experiments of nano-scratching and nano-cutting on single crystal silicon were carried out.

引用

页码：439 / 442

页数：3