Assembly of micro-optical devices using magnetic actuation

被引：0
|
作者：
Yi, Yong W. [1 ]
Liu, Chang [1 ]
机构：
[1] 319 B Microelectronics Laboratory, Univ. Illinois Urbana-C., Urbana, IL 61801, United States
来源：
Sensors and Actuators, A: Physical | 1999年 / 78卷 / 02期
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页码：205 / 211
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