Chemical and thermal stability of fluorinated amorphous carbon films for interlayer dielectric applications

被引：0
|
作者：
Chang, J.P. [1 ]
Krautter, H.W. [1 ]
Zhu, W. [1 ]
Opila, R.L. [1 ]
Pai, C.S. [1 ]
机构：
[1] Bell Labs, Lucent Technologies, Murray Hill, NJ 07974, United States
来源：
Materials Research Society Symposium - Proceedings | 1999年 / 565卷
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D O I：
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学科分类号：
摘要：
12
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页码：117 / 122
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